Quartz crystals for FTMs

EM-Tec Quartz crystals are particularly suited for thickness monitors, thickness controllers and quartz crystal microbalances (QCM) used with SEM sputter coaters and EM carbon evaporation systems and vacuum deposition systems. These plano-convex crystals are available in two sizes:

• Popular 14.0mm (0.55”) in diameter and  compatible with thickness measurement, controller and QCM systems using a 6MHz sensor.
• Smaller 12.5mm (0.49”) in diameter and compatible with systems using a 5 MHz sensor

See table (below right) for coater make/model and required crystal type

These quartz crystals are used on sputter coaters, carbon coaters and vacuum deposition systems from: Cressington, Agar, Bal-Tec, Denton, Emitech, Edwards, JEOL, Leica, Polaron, Quorum and Safematic.  EM-Tec quartz crystals are packaged in a flat pack carousel which contains 10 each QCM crystals.
The EM-Tec quartz crystals are available with two types of coating for the electrodes:

• Gold electrodes are standard and recommended for low film stress deposition materials, such as gold, silver, palladium, gold/palladium, platinum/palladium and copper
• Silver electrodes are recommended for high film stress deposition materials such as chromium, nickel, platinum, iridium and carbon.